Title: CMOS and EUV Nanophotonics

 

Mohamed ElKabbash

 

Wyant College of Optical Sciences, University of Arizona

 

Abstract: Nanophotonics is an interdisciplinary field that combines science and engineering to explore the behavior of light and its interactions with matter at the nanometer scale. In this talk, I will present our recent work in two new research areas: integrating nanophotonic devices into existing CMOS foundry processes (CMOS Nanophotonics), and developing novel optical elements for extreme ultraviolet (EUV) wavelengths (EUV Nanophotonics).

First, I will discuss our advancements in CMOS Nanophotonics, where we fabricate and integrate nanophotonic devices within established CMOS manufacturing processes. This integration enables the creation of advanced optoelectronic devices that merge photonic and electronic functionalities, leading to enhanced performance and new applications. I will detail our progress in creating high-speed optical modulators in standard CMOS foundry processes.

Second, I will address the challenges and progress in creating optical elements for EUV wavelengths, specifically at the technologically critical wavelength of 13.5 nm used in advanced CMOS manufacturing. At these wavelengths, all materials strongly absorb light and exhibit nearly identical refractive indices, making conventional optics and even meta-optics ineffective for light control. Consequently, current EUV optical systems rely exclusively on reflective optics like mirrors.To overcome these limitations, we are developing two new classes of optics that allow efficient control of EUV light. I will discuss these innovative optical elements and the breakthroughs we have achieved in manipulating EUV light, which hold promise for advancing EUV photonics and related technologies.

Bio: Mohamed ElKabbash is an Assistant Professor in the Wyant College of Optical Sciences, University of Arizona, where he leads the Quantum Photonics and Nanophotonics Group (QPANG). He did his PhD in Condensed Matter Physics at Case Western Reserve University (2013‐2017) where he was a Case Comprehensive Cancer Center fellow, then spent two years as a postdoctoral researcher in the Institute of Optics, University of Rochester (2018‐2020). Mohamed then joined the Quantum Photonics Group at MIT (2020‐2023). Mohamed’s research interests span a range of topics including Nanophotonics, Quantum optics, Optoelectronics, and table‐top experimental tests of fundamental physics