This seminar will give an overview of micro and nano technologies at the University of Michigan Lurie Nanofabrication Facility (LNF). In addition, we will present examples of research accomplishments and applications of these technologies in diverse fields including but not limited to Electrical Engineering, Physics, Life Sciences, Biomedical Engineering and Chemical Engineering.
Operated by the University of Michigan Solid-State Electronics Laboratory (SSEL), the LNF has extensive experience in microelectronics, micromechanics, optoelectronics, and micro and nano technologies based on silicon, compound semiconductor, and organic materials. It offers a complete laboratory for the fabrication of nanofabricated semiconductor and polymer electronic and optoelectronic devices and circuits, micromachined sensors, actuators, MEMS and miocrosystems, microfluidic devices, and analog and digital integrated circuits.
The LNF is a member of the National Nanotechnology Infrastructure Network (NNIN) which is supported by the National Science Foundation. The NNIN is a network of facilities from 14 universities, whose mission is to provide researchers across the nation open-access to leading-edge tools and capabilities. This seminar will also describe how the LNF and NNIN capabilities can be useful to researchers external to the University of Michigan.